JPH0255157U - - Google Patents
Info
- Publication number
- JPH0255157U JPH0255157U JP13298088U JP13298088U JPH0255157U JP H0255157 U JPH0255157 U JP H0255157U JP 13298088 U JP13298088 U JP 13298088U JP 13298088 U JP13298088 U JP 13298088U JP H0255157 U JPH0255157 U JP H0255157U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vacuum chamber
- lid
- sample stage
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13298088U JPH0255157U (en]) | 1988-10-12 | 1988-10-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13298088U JPH0255157U (en]) | 1988-10-12 | 1988-10-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0255157U true JPH0255157U (en]) | 1990-04-20 |
Family
ID=31390437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13298088U Pending JPH0255157U (en]) | 1988-10-12 | 1988-10-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0255157U (en]) |
-
1988
- 1988-10-12 JP JP13298088U patent/JPH0255157U/ja active Pending